Product Introduction
This small vacuum plasma cleaning machine adopts the inductive coupling type working principle. It plays a prominent role in the insulation of microwave tube and parts.
It is suitable for the treatment of sensitive products with high cleanliness.
Specification
| Item NO. | TS-SY05 |
| Cavity material | Quartz glass |
| Power frequency | 13.56Mhz |
| Volume(L) | 5 |
| Power(W) | 10%-100%(Adjustable) |
| Cavity dimensions(L*W*H)mm | Diamter160*240 |
| Overall dimentions(L*W*H)mm | 640*420*320 |
| Vacuum degree | 30pa-100pa |
| Gas flow | 100-1000ml/min(Adjustable) |
| Cleaning time | 1-100min(adjustable) |
| Cooling mode | Air cooling |
| Control mode | MCU Automatic and Manual mode |
| Vacuum cavity temperature | ＜65°C |
| Vacuum pump | Oil pump/dry pump(Optinal) |
| Power supply | AC220V |
| Frequency offset | ＜0.2KHz |
| Characteristic impedance | 50 ohms, automatic matching |
Product Features
1) The products are mainly suitable for small-scale production and scientific experiments;
2) The equipment has the advantages of compact structure, simple operation and easy maintenance;
3) Introducing core plasma technology from Germany;
4) Imported quartz glass material,corrosion resistant;
5) Imported needle valve precision flow control meter;
6) Two process reaction gas channels;
7) Can be customized according to customer needs.
Product Application
